HomeMy WebLinkAboutCLE202000084 Application 2020-07-22APPROVED
by the Albemarle County
Community Development Department
Zoning tleranee1"-%pplu+cation
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Albemarle County
Community Development
401 MclnOre Rd, North Wing
CharlottesNlle, VA 22902
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Phone 4U 29&5532
FOR OFFICE USE ONLY Clearance Number.« £ ZU J-el 00 41
Fee Amount: $ 54 Date Paid: 7 v By: [ Y
Receipt #: �f�j f/(&� 7C,/ p Y ??YL Y*heck #: L By:
Applicant - Fill out the entire page below
And return to Community Development 401 McIntire Rd, North Wing, Charlottesville, VA 22902
Name:
Kymaha )^�
E-Mail Address:
u
Mailing Address:
5 ' IOKb 1.J C Vfi 22
Phone #:
— 5
Tax Map and Parcel
and/or Address
the Business:02,
TMP* '- 0TF00-00-00-040 O
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Zoning:��9ht
Saffwill lloutifunknownof
Indnumber
Parcel Owner:
V•�S �/I F In10. �'/'1C.Owner's
Addrss:Check
;info.
any that apply:
�Y New Business Change of Use Change of Ownership L1 Change ofName
Business Name:
S`miconduc �
in Inc.
Description of Business:
Describe the business including use, number of employees,
number of shifts, availability of parking, and any
i eS item
rli+hide (O N) Semi
0 5 1-P l lat- wot-k o E e t o
) CLV661albift Op D67k
Previous Business on Site:
Floor Plan:
Please attach either an architectural drawing or a sketch of the proposed business indicating the location of uses, the
uses of rooms, the total square footage of the use, and any additional information.
Total Square Footage Used
for the Business:
2100 SF
Is the Parcel Zoned LI, HI, or PDIP?
Yes No
If yes, fill out a Certified Engineer's Report (CERI
Will there be food preparation?
Yes No
If yes, provide Virginia Department of Health approval
Is the Parcel on public water or private well?
iS6 Public n Private
If on private well, provide Virginia Department of Health approval
Is the Parcel on public sewer or septic?
LJ public ❑ Septic
If on septic, provide Virginia Department of Health approval
Will you be putting up any new signage?
J Yes 8 No
If yes, obtain appropriate sign permit and list permit # below
Will there be new construction or renovations?
LJ Yes Ivl No
If yes, obtain appropriate building permit and list permit # below
Please list any applicable Building Permit #s:
NCR
Zoning Clearance review cannot begin until the application above is complete and all applicable forms and fees are submitted.
This Clearance will only be valid on the parcel for which it is approved. If you change, intensify, or move the use to a new
location, a new Zoning Clearance will be required.
I hereby certify that I own or have the owner's permission to use the space indicated on this application. I also certify that the
information provided is true and accurate to the best of my knowledge. I have read the conditions of approval, and I understand
them, and that I will abide by them. nr.l�
Signature Printed )SyI—ee
Date 055 /01 / Z020
2
02
n�
For Albemarle County Staff Review Only
Proposed Use:
q
u
Permitted:
i as ❑ No
Permitted by Seetion: Z6 t Z
Supplementary Regulations:
-- � F �l
Applicable Special Use Permit
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Applicable Rezonings (ZMA):
Applicable Site Plans (SDP):
19 7-(
Parking:
If there is an approved she plan associated with the parcel, the parking requirements will be defined by the SDP. Some
parking requirements are determined by a ZMA or by an approved Code of Development.
g Formula:
Y LA1 + I U e -eL
Defined by:
Plan Ordinance ❑ COD ❑Existing
quare Footage of the Use:
tt❑SIte "❑Zoning
ded
number of parkingspaces:
S
iated Clearances:
1Z p _Cl CI L( ZC('If ZS'ZCefces: Lons:
rApprovakAdditional
,�_e
inspection necessary?:
❑ Yes �lo
spection on (date):
To Confirm:
ions of Approval:
Additional conditions of approval apply to Fireworks and Christmas Trees
Approval Information
Approved as proposed ❑ Approved with conditions
❑ Denied
❑ Backflow prevention device and/or current test data needed for this
site. Contact ACSA, 434.977.4511 ext. 117
❑ No physical site inspection has been done for this clearance. Therefore,
it is not a determination of compliance
with the existing site plan.
❑ This site complies with the site plan as of this date.
Conditions:
Additional Notes:
Building Official
Date
Zoning Official
Date ] Z l ' Z
Other Official
Date_ f /2-0/Z.Cj
County of Albemarle Department of Community Development
401 McIntire Road Charlottesville, VA 22902 Phone: 434.296.5832 Fax: 434.972.4126 4
�2 rll, ComAlbmmarloe County
Zoning Clearance Application m 401 Mdn1we Rd, North Wing
,..-. Chadonestllle, VA 22902
�rAGiNOh' Phone 434.296.5832
Applicant - If you are not the land owner, please fill out the entire page below confirming that you have either
informed or are going to inform the owner of your zoning clearance application.
CERTIFICATION THAT NOTICE OF THE APPLICATION HAS BEEN
PROVIDED TO THE LANDOWNER
I certify that I will provide (or have provided) notice of this clearance application,
C`E 2 Z-0- 8y
clearance number provided by Staff or business name
to VfFS 4 V4rginIuL, Inc. the owner
Name of landowner on record
of Tax Map and Parcel Number 0--700-00-00— 040K0 by either delivering a
TMP number of property
copy of the application to them in person or by sending them a copy of the application by
mail. (Please check one of the following below)
Hand delivering a copy of the application to the owner identified above on
Date 05 /0'B/ 2ca-o
❑ Mailing a copy of the application to the owner identified above on
Date to the following address:
(Written notice to the owner and last known address on our record books will satisfy this
requirement. Please see staff for help determining this information if needed)
Signature of Applicant
Applicant Name Printed k<YUSOJI% L-Qe
Date 05 /01 / 202o
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Return to "What Pages Do I Fill Out For My Facility?"
VIRGINIA DEPARTMENT OF ENVIRONMENTAL QUALITY - AIR PERMITS
LOCAL GOVERNING BODY CERTIFICATION FORM
Business Entity Name (same name on file with the Virginia Scc)
Registration Number: 81780
FUTURE SEMICONDUCTOR BUSINESS, INC.
Applicant's Name:
Name of Contact Person at the site:
K usan Lee
David Seun -H un Lee
Applicant's Mailing address:
Contact Person Telephone Number:
5429 Oxbow Dr.
Crozet, VA 22932
434-234-2033
Facility location (also attach map):
1740 Broadway Street, Charlottesville, VA 22902
Facility type, and list of activities to be conducted:
Laboratory Research, Development for Prototype Products of Gallium Nitride GaN Semiconductor Wafer
The applicant is in the process of completing an application for an air pollution control permit from the Virginia
Department of Environmental Quality. In accordance with § 10.1-1321.1. Title 10.1, Code of Virginia (1950), as
amended, before such a permit application can be considered complete, the applicant must obtain a certification from
the governing body of the county, city or town in which the facility is to be located that the location and operation of the
facility are consistent with all applicable ordinances adopted pursuant to Chapter 22 (§§ 15.2-2200 et sea.) of Title
15.2. The undersigned requests that an authorized representative of the local governing body sign the certification
below.
Applicant's
-7
Date:
05 /01 /20D-O
signature:
The undersigned local government representative certifies to the consistency of the proposed location and
operation of the facility described above with all applicable local ordinances adopted pursuant to Chapter 22 (§§15.2-
2200 et seq.) of Title 15.2. of the Code of Virginia (1950) as amended, as follows:
(Check one block)
The proposed facility is fully consistent with all applicable local ordinances.
u The proposed facility is inconsistent with applicable local ordinances; see attached information.
Signature of Date:
authorized
government
representative:
Type or Title:
print name:
County, city or town:
[THE LOCAL GOVERNMENT REPRESENTATIVE SHOULD FORWARD THE SIGNED CERTIFICATION TO THE
APPROPRIATE DEQ REGIONAL OFFICE AND SEND A COPY TO THE APPLICANT.]
Form 7 — December 19, 2018 Page 5
A map of site location
1740 Broadway Street, Charlottesville, VA 22902
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COUNTY OF ALBEMARLE
Department of Community Development
401 McIntire Road
Charlottesville, Virginia 22902-4596
Phone (434) 296-5832 Fax (434) 972-4126
MEMORANDUM
TO: Zoning Clearance or Home Occupation Applicant
FROM: Zoning Division
RE: Request for Approval of Letter of Performance Standards or
Certified Engineer's Report
Proposed Business/Use:tjaryl 4 GnAf SPini(bnd tC'fot- Guct4
Address: 1140 RI OMw4a S . h t-lo tesyillelle , VA -a)-102
Re CLE (Zoning Clearance Number): it
HO (Home Occupation Number):
Contact Person: b0.Vtd Se"--bytim Lee
v
Phone Number: 434---234 —.2O33
Fax Number: Date Faxed to Applicant:
�r1a,l a slyt-5 Q m, edu. ( 2 b►-e4' ►,- -h
Please return this form along with all required documentation to the Zoning Division upon
completion.
Thank you.
To be completed by staff:
Approved: ?` 2 O ` Z-D
Comments:
CER Packet Revised 2/11/09
FC Facilities Engineering
Engineer's Report
Zoning Compliance Clearance
Future Semiconductor Business, Inc
1740 Broadway St, Charlottesville, VA 22902
Applicant: Kyusang Lee
July 7, 2020
Submitted to:
Albemarle County
Community Development Department
Division of Zoning and Current Development
401 McIntire Rd
Charlottesville, VA 22902
Affadavit for the Engineer's Report
This report describes the premises proposed for production of semiconductor
products and the zoning implications of this use. It addresses the proposed
operation, equipment, process, materials to be used, and the nature of the expected
effluents, exhausts, discharges, noises, and other potential impacts or hazards.
The undersigned respectfully submits this report for review by county officials on
behalf of, and based upon information from, applicant for this property.
apyin pP ON
0` F
O
RANCIS CARUCCIO �
Lic. No.39108
07�,07/2o2c
P. 1 of 5 z:H27364.CER.final
FC Facilities Engineering
Overview
This report is based upon two site visits to the subject premises, made on June 22, 2020 and on
July 6, 2020, and on files and information provided by the applicant, Kyusang Lee.
The reviewing engineer has extensive experience with the evaluation and installation of
semiconductor equipment in various jurisdictions in the United States and Canada, including
within the Commonwealth of Virginia.
Description of Premises
The proposed premises is a demised suite within the warehouse building at 1740 Broadway
Street in Charlottesville. The suite is approximately 20 feet wide by 80 feet long, with a clear
ceiling height of approximately 16 feet. At the time of review, the suite did not have a number
designation or tag.
The space has "party wall' separations on three sides and has a single exterior wall with egress
door on the south end. The north wall has a double door set (marked as egress) which
communicate with a warehouse and storage space which is outside of the leased premises of the
applicant. The main electrical panels serving the suite are located on the suite -side of this north
wall.
The space is fully sprinkled, with unfinished concrete floor and exposed steel framed roof
structure above. There is HVAC ductwork passing through the space, presumably serving
neighboring spaces from the rooftop mounted equipment above this space — however, the duct
openings within this space have been blanked -off and sealed. HVAC for the space is provided
by a single, un-ducted, air handling unit which is suspended from the ceiling within the space.
The outdoor unit for this system is located on the exterior of the building on the south side. It
appears no provision has been made for outside air to this space beyond infiltration.
Lighting is provided by ceiling mounted fluorescent fixtures and there are egress lights mounted
within the space. There are no windows or wall openings in the suite, other than the storefront
glass door on the south wall. There is no plumbing service within the demised space, although a
service sink stands in one corner of the space with the expectation by the applicant that it will be
connected and installed for use.
Nature of Operation — Business Activities Planned
The applicant intends to utilize the premises for the singular operation of a semiconductor
vacuum deposition tool for deposition of single crystals of Gallium Nitride (GaN) and hexagonal
Boron Nitride (h-BN) onto sapphire substrates.
The substrates will be introduced into the space from an outside source and will be further used
post -deposition in separate locations outside of the space. No etching, rinsing, masking or other
p. 2 of 5 z:H27364.CER.final
FC Facilities Engineering
semiconductor process operations are planned within the space beyond these deposition
activities.
Similarly, the only components or materials planned for deposition are Gallium and Boron via
Nitride plasma. It is common to perform deposition involve other materials — some with
potential high hazards including various hydrides and metalorganics — however no other
materials are planned for use in this space.
The deposition process planned is accomplished by introducing previously prepared substrate
wafers into the chamber of a Molecular Beam Epitaxy (MBE) tool. These wafers are then
subject to ultrahigh vacuum within the chamber via a series of specialized vacuum pumps to
eliminate all other elements in the immediate environment of the chamber. Deposition is then
achieved by electron beam acting on high purity ingot sources of the metals accompanied by a
flowing plasma of Nitrogen gas as excited by a Radio -Frequency (RF) generator.
At the completion of deposition cycle (typically several hours), the chamber vacuum is broken
with inert Nitrogen gas and the chamber is returned to atmospheric pressure.
Cleaning of the chamber between cycles is simply by wiping (typically with small quantities of
Isopropyl Alcohol) and pump purges are achieved with cycles of inert Nitrogen gas.
E uipment
The planned operation will utilize a single Riber model 32 MBE tool which has been installed in
the space. The various vacuum pumps — electric powered — include: ion pump, turbomolecular
pump, dry pump and a cryogenic pump. A closed-circuit, water-cooled cryogenic compressor
will be used to cycle Helium for cooling circuit in the cryogenic pump. An air-cooled chiller
will be used for cooling system components. An air compressor with 2 gallon receiver is also
used.
Various electronic control, power generation and Radio -Frequency generation panels are rack -
mounted and complete the control and operating systems.
Materials Used
As described above, sapphire substrates will be acquired externally for this operation.
Ingot sources of Gallium, Boron, Magnesium, and Silicon will be purchased and will be used in
the effusion cells of the MBE tool for deposition.
Cylinder gases, including two cylinders of high -purity Nitrogen (H size cylinder or smaller), a
single cylinder of Helium (H size cylinder or smaller) and two dewars of Liquid Nitrogen will be
the only other materials required to perform the deposition process.
p. 3 of 5 z:H27364.CER.final
FC Facilities Engineering
Compliance with Performance Standards
4.14.1 Noise
The only process sources of noise are the operation of the various pumps, compressors, and
vacuum pumps. These operate both intermittently and for sustained periods of hours. The
pumps individually all operate at less than 70 dB and are sized under I HP. No significant noise
will be discernable beyond the demised premises and noise sourced from this operation will
certainly remain well below the permissible 65 dBA level at the lot line. The noise generated
from this operation should not contribute greater than 10 dBA to the existing ambient levels at
the lot line.
4.14.2 Vibration
The only process sources of vibration are the operation of the various pumps, compressors, and
vacuum pumps. The nature of the deposition process requires minimal vibration and, as such,
the isolation provided on the individual pump bases combined with the significant mass of the
concrete floor will eliminate all detectable vibration.
4.14.3.a. Glare
The entire operation is performed within the interior of the demised space. The only sources of
glare are from the overhead lighting within the space. As such, no glare is visible beyond the
confines of the demised space.
4.14.3.b Intense Glare
Not applicable.
4.14.3.c Intense Heat
The deposition process takes place in an ultra -high vacuum (UHV) environment at temperatures
of 600°C to 900°C. All heat generated in the process is contained within the MBE chamber
during a process cycle and then the chamber vacuum is broken with the introduction of (room
temperature) Nitrogen gas and is cycled to exhaust via the vacuum pumps. The discharge from
the pump exhaust will be connected to a roof vent. The minimal volumetric discharge of this
exhaust flow will produce an effluent flow that will not measurably increase ambient
temperature beyond the point of discharge.
4.14.4 Electrical Disturbance
Electrical power from the three-phase source panels is the space will be used to power the
electron -beam source for evaporating ingot materials in the MBE chamber and for the RF
generation required for plasma generation. The localized generation of RF, via shielded cables,
p. 4 of 5 z:H27364.CER.final
FC Facilities Engineering
in the High Frequency (HF) range 3-30 MHz will not extend beyond the immediate vicinity of
the equipment. No electrical disturbance in any range will be detected beyond the demised
space.
Air Emissions
The only potential emissions from the process are air elements from vacuum pump discharge and
low level contributions of inert gases introduced to the process (Nitrogen and Helium). No
emissions subject to regulation, at any level, are created by the process.
Water Discharizes
No open -loop water processes are involved. The water used in the closed -loop chiller (with 3.5
gallon reservoir capacity) will not be contaminated and may be discharged occasionally as
normal sanitary waste.
Radiation
Not applicable.
Flammable/Hazardous/Explosive
No flammable, hazardous, or explosive materials are used in this process. Three cylinders of gas
under high pressure (2000 psi) and two Liquid Nitrogen dewars will be used in the process and
kept on the premises. Good cylinder handling practices (anchoring, supporting) and local
detection of oxygen depletion for occupant safety are recommended, but the presence and use of
these materials does not create hazard of note.
Disposal of Waste / Spill Containment
Not applicable.
Summary
The operation planned by the applicant for the proposed space meets all applicable zoning
standards for Albemarle County and does not represent risk or hazard for the environment
beyond normal business operations. Nothing in this report is intended to evaluate suitability of
the space for a particular operation or the conformance of the space to existing building codes
and regulations. This report only certifies that the operation as planned is suitable to the zoning
district designated, with respect to performance standards listed above.
p. 5 of 5 z:H27364.CER.final